Lord Shiva is worshipped with all sixteen rituals along with chanting of Puranik Mantras during Shivaratri and other ocassions related to Lord Shiva. Worshipping Gods and Goddesses with all 16 rituals is known as Shodashopachara Puja (षोडशोपचार पूजा).
Puja should begin with the meditation of Lord Shiva. Dhyana should be done in front of Shivalinga. Following Mantra should be chanted while meditating on Lord Shiva.
Dhyayennityam Mahesham Rajatagirinimam Charu Chandravatamsam।
Ratnakalpojjvalanga Parashumrigavarabhitihastam Prasannam॥
Padmasinam Samantat Stutamamaragnairvyaghra Kritim Vasanam।
Vishvavadyam Vishvabijam Nikhila-Bhayaharam Panchavaktram Trinetram॥
Vandhuka Sannibham Devaṃ Trinetram Chandra Shekharam।
Trishul Dharinam Devaṃ Charuhasam Sunirmalam॥
Kapal Dharinam Devaṃ Varadabhaya-Hastakam।
Umaya Sahitam Shambhum Dhyayet Someshwaram Sada॥
Avahanam Samarpayami - After Dhyana of Lord Shiva, one should chant following Mantra in front of the Murti, by showing Avahan Mudra (Avahan Mudra is formed by joining both palms and folding both thumbs inwards).
Agachchha Bhagavandeva Sthane Chatra Sthirobhava।
Yavatpujam Karishyami Tavattvam Sannidhaubhava॥
Padyam Samarpayami - After Lord Shiva has been invoked, offer Him water to wash the feet while chanting following Mantra.
Mahadev Maheshan Mahadev Paratparah।
Padyam Grihana Machhatam Parvati Sahiteshwarah॥
Arghyam Samarpayami - After Padya offering, offer water to Shri Shiva for head Abhishekam while chanting following Mantra.
Tryambakesha Sadachara Jagadadi-Vidhayakah।
Arghyam Grihana Devesh Samb Sarvarthadayakah॥
Achamaniyam Samarpayami - Now offer water to Shri Shiva for Achamana while chanting following Mantra.
Tripurantak Dinarti Nashaka Shri Kantha Shashvat।
Grihanachamaniyam Cha Pavitrodak-Kalpitam॥
Godugdha Snanam Samarpayami - Now give a bath with cow milk while chanting following Mantra.
Madhura Gopayah Punyam Pataputam Puruskritam।
Snanartham Dev Devesh Grihana Parameshwarah!॥
Dadhi Snanam Samarpayami - Now give a bath with curd while chanting following Mantra.
Durlabham Divi Suswadu Dadhi Sarva Priyam Param।
Pushtidam Parvatinatha! Snanaya Pratigrihyatama॥
Ghrita Snanam Samarpayami - Now give a bath with Ghee while chanting following Mantra.
Ghritam Gavyam Shuchi Snigdham Susevyam Pushtimichchhatam।
Grihana Girijanatha Snanaya Chandrashekharah॥
Madhu Snanam Samarpayami - Now give a bath with honey while chanting following Mantra.
Madhuram Mridumohaghnam Swarabhanga Vinashanam।
Mahadevedmutsrishdham Tab Snanaya Shankarah॥
Sharkara Snanam Samarpayami - Now give a bath with sugar while chanting following Mantra.
Tapashantikari Shitamadhuraswada Samyuta।
Snanartham Dev Devesh! Sharkareyam pradiyate॥
Shuddhodaka Snanam Samarpayami - Now give a bath with fresh water while chanting following Mantra.
Ganga Godavari Reva Payoshni Yamuna Tatha।
Saraswatyadi Tirthani Snanartham Pratigrihyatam॥
Vastram Samarpayami - After giving bath with Panchamrita to Lord Shiva offer Him clothes while chanting following Mantra.
Sarvabhushadhike Saumye Loka Lajja Nivarane।
Mayopapadite Deveshwar! Grihyatam Vasasi Shubhe॥
Yagyopavitam Samarpayami - After Vastram offering, offer holy thread to Lord Shiva while chanting following Mantra.
Navabhistantubhiryuktam Trigunam Devatamayam।
Upavitam Chottariyam Grihana Parvati Patih!॥
Gandham Samarpayami - After this offer sandalwood paste or powder to Lord Shiva while chanting following Mantra.
Shrikhand Chandanam Divyam Gandhadhyam Sumanoharam।
Vilepanam Sur Shreshthah Chandanam Pratigrihyatama॥
Akshatan Samarpayami - After Gandham offering, offer Akshat to Lord Shiva while chanting following Mantra. (Seven times washed unbroken rice are known as Akshat).
Akshatashcha SuraShreshthah Shubhra Dhutashcha Nirmala।
Maya Nivedita Bhaktya Grihana parameshwarah॥
Pushpamalam Samarpayami - After this offer flowers and garland to Lord Shiva while chanting following Mantra.
Malyadini Sugandhini Malatyadini Vai Prabhu।
Mayanitani pushpani Grihana parameshwarah॥
Bilva Patrani Samarpayami - After this offer Bilvapatram to Lord Shiva while chanting following Mantra.
Bilvapatram Suvarnen Trishulakara Meva Cha।
Mayarpitam Mahadev! Bilvapatram Grihaname॥
Dhoopam Aghrapayami - After this offer Agarbatti or Dhoop-batti to Lord Shiva while chanting following Mantra.
Vanaspati Rasodbhuta Gandhadhyo Gandha Uttamah।
Aghreyah Sarvadevanam Dhoopoyam Prati Grihyatam॥
Deepam Darshayami - After this offer enlightened earthen lamp of pure Ghee to Lord Shiva while chanting following Mantra.
Ajyam Cha Varti Samyuktam vahnina Yojitam Maya।
Deepam Grihana Devesh! Trailokyatimirapah॥
Naivedyam Nivedayami - Wash your hands after lamp offering and offer Naivedya. It should include different type of fruits and sweets and offer this to Lord Shiva while chanting following Mantra.
Sharkaraghrita Samyukta Madhuram Swaduchottamam।
Upahara Samayuktam Naivedyam Pratigrihyatam॥
Achamaniyam Samarpayami - After offering Naivedya, offer Achamana to Lord Shiva while chanting following Mantra.
Eloshira Lavangadi karpura parivasitam।
Prashanartham Krita Toyam Grihana Girijapatih!॥
Tambula Nivedayami - After this offer betel leaf (Tambula) to Lord Shiva while chanting following Mantra.
Pungi Phalam Mahad Divyam Nagavallidalairyutam।
Elachurnadi Samyukta Tambulam Pratigrihyatam॥
Dakshinam Samarpayami - After offering Tambulam, offer money to Lord Shiva while chanting following Mantra.
Hiranyagarbha Garbhastham Hemabijam Vibhavasoh।
Anant Punya Phaladamatah Shantim Prayachchha Me॥
Aarartikyam Samarpayami - After offering Dakshina, offer Aarti with lit camphor in Puja Thali to Lord Shiva while chanting following Mantra.
Kadali Garbha Sambhutam Karpuram Cha Pradipitam।
Aarartikyamaham Kurve Pashya Me Varado Bhava॥
Pradakshinam Samarpayami - After Aarti, take half Parikrama of Lord Shiva while chanting following Mantra.
Yani Kani Cha Papani Janmantar Kritani Vai।
Tani Sarwani Nashyantu Pradakshinam Pade Pade॥
Mantra Pushpanjali Samarpayami - After Pradakshina offer incantations and flowers to Lord Shiva while chanting following Mantra.
Nana Sugandhapushpaishcha Yatha Kalodbhavairapi।
Pushpanjali Mayadattam Grihana Maheshwarah॥
After Mantra Pushpanjali offer apologies and ask for forgiveness to Lord Shiva while chanting following Kshama-Prarthana Mantra.
Avahanam Na Janami Na Janami Tavarchanam।
Pujam Chaiva Na Janami Kshamasva Maheshwarah॥
Anyatha Sharanam Nasti Tvameva Sharanam Mam।
Tasmatkarunayabhavena Rakshasva Parvatinathah॥
Gatam Papam Gatam Duhkham Gatam Daridrayameva Cha।
Agata Sukha Sampatih Punyachcha Tava Darshanat॥
Mantrahinam Kriyahinam Bhaktihinam Sureshwar!।
Yatpujitam Maya Deva Paripurnam Tadastu Me॥
Yadaksharapada Bhrashtam Matrahinam Cha Yadbhavet।
Tat Sarvam Kshamyatam Deva Prasida Nandikandharah॥